The fully automatic multi-stage optical inspection tool VVF4000 is optimized to inspect devices from the top, the bottom (optionally) and both their facets at very high throughput. With this new design, even as small as 1µm defects can be reliably detected on all sides. Frames are loaded automatically from magazines and each device is fully inspected from all sides in few seconds.
The full automatic die inspection sorter VVSP4000 picks up the chips from a carrier and re-sorts them after automatic optical inspection. In this set-up, high resolution pictures of the p-side and both facets (bottom side optional) are taken in a dedicated stage allowing the smallest defects to be identified. The sorting function is the main aspect of this machine.