The fully automatic optical inspection tool VVS2000 is able to inspect devices from the top and their lateral walls. In this particular tool a specially designed optical stage allows the inspection to be performed without picking up the devices.
The full automatic die inspection sorter VVS4000 picks up the chips from tape and takes high resolution pictures of the p-side and both facets (bottom side optional). The dedicated stage allows the smallest defects to be identified. Defective chips are sorted out automatically.