Optical Inspection tools from Opto System Co. Ltd
for high-resolution analysis of all device sides, including the bottom side and the facets.

Optical Inspection tools from OPTO SYSTEM

Full automatic optical inspection tools for high-resolution analysis of all device sides, including the bottom side and the facets.

The fully automatic optical inspection tool VVS2000 is able to inspect devices from the top and their lateral walls. In this particular tool a specially designed optical stage allows the inspection to be performed without picking up the devices.

The full automatic die inspection sorter VVS4000 picks up the chips from tape and takes high resolution pictures of the p-side and both facets (bottom side optional). The dedicated stage allows the smallest defects to be identified. Defective chips are sorted out automatically.

Since optical inspection is often done right after the facet coating, why not combining both functions in a tool while we are holding the laser bar? This tool comes with all the advantages of a dedicated unstacker and a dedicated optical inspection tool with no compromises.

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