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Opto System Visual Inspection Tool VVS3000

Highlights of the OptoSystem OptoSystem Laser Diode Chip Visual Inspection Tool VVS3000

Diode Facet Inspection.

100% optical inspection of the top side and the whole area of both facets down to 1µm.

High Throughput.

The optical set up enables facet inspection withouth the need of chip pick and place.

High Versatility.

Low cost of ownership means you can adapt the inspection tool to new types by yourself.


Vision Setup.

High resolution cameras, perfect lighting and intelligent algorithms find potential defects.

Technology Made in Japan.

Reliable and robust tools made in Japan with high quality materials for stable long term operation.

Full Automatic Function.

With an optional autoloader you can further extend the no-interaction operation.

Full Automatic Laser Chip Optical Inspection

Description Opto System Laser Diode Chip Visual Inspection Tool VVS3000

The full automatic optical inspection VVS3000 is an upgrade from the already successful VVS2000 and is able to detect even smaller defects on the whole facets. Thanks to a dedicated optical stage, this new model is able to detect 1µm and larger defects on the whole length and height of both facets. The geometry of the lasers is irrelevant, because the specialty of this tool is that the diodes do not need to be picked up from the tape. The optical set-up that looks at the facets from the side at an angle and a clever algorithm are able to identify potential defects even for laser diodes with several Watts per emitter. The optics in the VVS3000 make the handling of the chips unnecessary, which saves precious time and increases the throughput. The pictures are analyzed with a state-of-the art algorithm and the pictures can be saved in a database. We support our customers to get started in production from day one, however you will not need our help to teach new types to this tool thanks to its intuitive programming of the inspection algorithm.


What about a machine that can do more than the inspection?

It depends on your situation: The VDVS3000 combines for instance laser bar unstacking and optical inspection, and the VVSP4000 not only has a more thorough optical inspection but also performs a sorting in different bins for immediate delivery to customers. The VVS2000 tool is the best option if you are just interested in optical inspection and the resolution of 3µm for the facets is good enough for your product. A larger throughput can be achieved with the VVF4000 because it inspects the top side and the facets simultaneously, almost doubling the throughput. If you can afford to avoid touching the chips at this stage, you can save a lot of precious time while getting inspection yields similar with other slower tools with a dedicated optical stage for high resolution inspection. Most tools that OptoSystem delivers are custom made to meet specific requirements so do not hesitate to reach out if you have  a totally different configuration in mind.

What is the maximum resolution of the visual inspection?

We can adjust the camera amplification and resolution to your requirements but the challenge of not picking up the chips poses some limits on the optical inspection of the facets. With this optical setup for failure recognition on the facet we feel confident in detecting a minimum defect size detection of 1µm over the whole facet’s height and length. The top side defects are as well detected with 1µm size or larger. The pictures are automatically evaluated for defects and the chip is electronically labeled as good or bad depending on the criteria. The pictures that show the defects are saved in a HDD and can be reviewed later for recognizing eventual false negatives.

What happens when defects are identified?

The pictures can be saved in a HDD for an optional later validation through an operator. The identified parts are marked in a map data output so that in the following processing steps they can be ignored and scrapped. As an option we can have them physically sorted out directly at the VVS3000 as well. There is still the option of ink-marking the defective devices whereas this is nowadays a bit outdated and it carries the risk of cross contamination of adjacent chips. For this tool we tend to recommend the map data and to choose a sorter with automatic optical inspection if you do want to sort your devices at this processing step. After the optical inspection the laser diodes are usually picked up for mounting. A map is usually enough to identify the bad chips.

Do you process my wafers?

Right now we do not have the capability to act as an OEM manufacturer but we are looking for partners to be able to do so in the future. If you want to try out how our tools work on your devices, please get in touch and send us some samples. We are eager to show off and learn about new applications. If you own OptoSystem tools and would like to offer OEM services, please get in touch too!

Why Opto System?

Opto System’s tools are built to last and very robust with a focus on performance and quality. Opto System has been around for for more than 40 years and has earned a reputation for excellent tools in the semiconductor industry across the world. Most of the laser diodes manufacturers in the world, including the largest, are OptoSystem customers. These tools are also very cheap to operate because we help you to get started in your process but you won’t really need us to learn new types for instance.

Who or What is Tomosemi?

TomoSemi is a manufacturer’s representative appointed by Opto System to promote Opto System’s products and to help customers in Europe since we are local.


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